JPH056853B2 - - Google Patents

Info

Publication number
JPH056853B2
JPH056853B2 JP60152066A JP15206685A JPH056853B2 JP H056853 B2 JPH056853 B2 JP H056853B2 JP 60152066 A JP60152066 A JP 60152066A JP 15206685 A JP15206685 A JP 15206685A JP H056853 B2 JPH056853 B2 JP H056853B2
Authority
JP
Japan
Prior art keywords
light
light receiving
optical path
rotation
beam splitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60152066A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6212814A (ja
Inventor
Tetsuji Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60152066A priority Critical patent/JPS6212814A/ja
Publication of JPS6212814A publication Critical patent/JPS6212814A/ja
Priority to US07/196,850 priority patent/US4868385A/en
Publication of JPH056853B2 publication Critical patent/JPH056853B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP60152066A 1985-07-10 1985-07-10 ロ−タリ−エンコ−ダ− Granted JPS6212814A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60152066A JPS6212814A (ja) 1985-07-10 1985-07-10 ロ−タリ−エンコ−ダ−
US07/196,850 US4868385A (en) 1985-07-10 1988-05-17 Rotating state detection apparatus using a plurality of light beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60152066A JPS6212814A (ja) 1985-07-10 1985-07-10 ロ−タリ−エンコ−ダ−

Publications (2)

Publication Number Publication Date
JPS6212814A JPS6212814A (ja) 1987-01-21
JPH056853B2 true JPH056853B2 (en]) 1993-01-27

Family

ID=15532307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60152066A Granted JPS6212814A (ja) 1985-07-10 1985-07-10 ロ−タリ−エンコ−ダ−

Country Status (2)

Country Link
US (1) US4868385A (en])
JP (1) JPS6212814A (en])

Families Citing this family (39)

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Publication number Priority date Publication date Assignee Title
JPH073344B2 (ja) * 1987-06-15 1995-01-18 キヤノン株式会社 エンコ−ダ−
JP2586120B2 (ja) * 1988-09-22 1997-02-26 キヤノン株式会社 エンコーダー
JP2586121B2 (ja) * 1988-09-30 1997-02-26 キヤノン株式会社 ロータリーエンコーダの原点検出系
JP2649390B2 (ja) * 1988-10-12 1997-09-03 キヤノン株式会社 信号内挿回路
US5198873A (en) * 1988-10-19 1993-03-30 Canon Kabushiki Kaisha Encoder utilizing interference using multi-mode semiconductor laser
FR2638874B1 (fr) * 1988-11-10 1994-07-01 Thomson Csf Procede d'estimation du mouvement d'au moins une cible dans une suite d'images, et dispositif pour la mise en oeuvre de ce procede
JP2586122B2 (ja) * 1988-11-18 1997-02-26 キヤノン株式会社 ロータリーエンコーダ
DE3901534C1 (en]) * 1989-01-20 1990-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
JP2629948B2 (ja) * 1989-03-03 1997-07-16 キヤノン株式会社 エンコーダー
DE69011188T2 (de) * 1989-05-12 1994-12-08 Canon Kk Kodierer.
JP2774568B2 (ja) * 1989-05-12 1998-07-09 キヤノン株式会社 ロータリーエンコーダー
JP2683117B2 (ja) * 1989-10-31 1997-11-26 キヤノン株式会社 エンコーダー
JP2780409B2 (ja) * 1990-01-20 1998-07-30 キヤノン株式会社 角度検出装置
DE9007584U1 (de) * 1990-03-13 1992-11-19 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Positionsmeßeinrichtung
JP3034899B2 (ja) * 1990-04-09 2000-04-17 日本電信電話株式会社 エンコーダ
US5068528A (en) * 1990-08-28 1991-11-26 The Boeing Company Encoded surface position sensor with multiple wavelengths and reference beam
US5223708A (en) * 1991-10-04 1993-06-29 The Boeing Company Alignment insensitive optical position sensor
CA2073409A1 (en) * 1991-10-15 1993-04-16 Paul F. Sullivan Light beam position detection and control apparatus employing diffraction patterns
US5235177A (en) * 1991-10-29 1993-08-10 Maximum, Inc. Angular position sensor using a polarized disc with coded tracks
JP3218657B2 (ja) * 1991-12-04 2001-10-15 キヤノン株式会社 ロータリーエンコーダ
JPH05234242A (ja) * 1992-02-20 1993-09-10 Ricoh Co Ltd スピンドルモータのサーボ装置
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
DE69325799T2 (de) * 1992-05-05 2000-04-13 Microe, Inc. Apparat zum detektieren einer relativen bewegung
US5349183A (en) * 1993-07-12 1994-09-20 Rockwell International Corporation Diffraction grating rotary speed sensor having a circumferentially variable pitch diffraction grating
US5442172A (en) * 1994-05-27 1995-08-15 International Business Machines Corporation Wavefront reconstruction optics for use in a disk drive position measurement system
TW256914B (en) * 1994-05-27 1995-09-11 Ibm Servo-writing system for use in a data recording disk drive
JP2809190B2 (ja) * 1996-04-30 1998-10-08 日本電気株式会社 光アイソレータ
JPH10253907A (ja) * 1997-03-13 1998-09-25 Fujitsu Ltd スキャナ
IL144806A (en) * 2001-08-08 2005-11-20 Nova Measuring Instr Ltd Method and apparatus for process control in semiconductor manufacturing
TWI255351B (en) * 2003-08-08 2006-05-21 Ind Tech Res Inst Method of fabricating a fine optical grating element stamper
US20050117222A1 (en) * 2003-11-28 2005-06-02 Kuo-Chi Chiu Precise optical grating element and method of making a stamper thereof
DE102005044651A1 (de) * 2005-09-19 2007-03-22 Siemens Ag Patientenlagerungsvorrichtung für eine Strahlentherapie
KR20100084019A (ko) * 2009-01-15 2010-07-23 삼성전자주식회사 회전체의 원점 인식 장치 및 방법
RU2593381C2 (ru) 2011-02-18 2016-08-10 Сан Пэтент Траст Способ формирования сигналов и устройство формирования сигналов
CN102564355B (zh) * 2011-12-29 2013-11-27 中国科学院长春光学精密机械与物理研究所 干涉式高密度圆光栅偏心检测方法
WO2019044626A1 (ja) 2017-08-29 2019-03-07 三井化学株式会社 繊維収束剤、無機強化材、樹脂組成物および成形体
WO2020215205A1 (zh) * 2019-04-23 2020-10-29 大族激光科技产业集团股份有限公司 一种光栅盘及反馈系统
WO2022197250A1 (en) * 2021-03-17 2022-09-22 Ams Sensors Singapore Pte. Ltd. Rotary encoders
US12048484B2 (en) 2021-04-21 2024-07-30 Amo Development, Llc Compact autocylinder compensation module for autorefractor and autorefractor with autocylinder compensation module

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493959A (en) * 1966-06-23 1970-02-03 Sperry Rand Corp Interferometric shaft angle encoder having natural binary readout
JPS475047Y1 (en]) * 1969-07-16 1972-02-22
US3726595A (en) * 1970-01-07 1973-04-10 Canon Kk Method for optical detection and/or measurement of movement of a diffraction grating
DE2003492A1 (de) * 1970-01-27 1971-08-12 Leitz Ernst Gmbh Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens
JPS5327958B2 (en]) * 1971-09-01 1978-08-11
DE2163200C2 (de) * 1971-12-20 1983-06-09 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur berührungslosen Messung
JPS57190203A (en) * 1981-05-19 1982-11-22 Yokogawa Hokushin Electric Corp Device for reading optical scale
JPS57190202A (en) * 1981-05-19 1982-11-22 Yokogawa Hokushin Electric Corp Device for reading optical scale
JPS57207805A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Displacement measuring device
JPS58191907A (ja) * 1982-05-04 1983-11-09 Canon Inc 移動量測定方法
JPS58191906A (ja) * 1982-05-04 1983-11-09 Canon Inc 基準尺を用いた測長方法
DE3486178T2 (de) * 1983-11-04 1993-10-21 Sony Magnescale Inc Optisches Instrument zur Messung einer Verschiebung.

Also Published As

Publication number Publication date
US4868385A (en) 1989-09-19
JPS6212814A (ja) 1987-01-21

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Legal Events

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EXPY Cancellation because of completion of term